Chinese Optics Letters, Vol. 18, Issue 12, 123801 (2020)
Picosecond burst pulse machining with temporal energy modulation [Invited]
Akinao Nakamura1, Tomoki Mizuta1, Yasuhiko Shimotsuma1,*, Masaaki Sakakura1, Tomohito Otobe2, Masahiro Shimizu1, and Kiyotaka Miura1
- 1Department of Material Chemistry, Graduate School of Engineering, Kyoto University, Kyoto 615-8510, Japan
- 2National Institutes for Quantum and Radiological Science and Technology, Kansai Photon Science Institute, Kyoto 619-0215, Japan
Suppression of stress and crack generation during picosecond laser processing in transparent brittle materials such as glass was successfully demonstrated by a picosecond laser pulse with temporal energy modulation. The origin of deterioration in processing accuracy could be interpreted in terms of the discontinuous movement of plasma in the vicinity of the focus. To reveal the effectiveness of the temporal energy modulation for smooth machining, such plasma motion was simulated by the finite-difference time-domain method. Furthermore, photoinduced birefringence was observed using a high-speed polarization camera.
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