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  • Received: Nov. 26, 2018

    Accepted: Mar. 8, 2019

    Posted: Jun. 5, 2019

    Published Online: Jun. 5, 2019

    The Author Email: Guang Qian (chinaqgll@163.com)

    DOI: 10.3788/COL201917.061301

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    Guang Qian, Bin Niu, Wu Zhao, Qiang Kan, Xiaowen Gu, Fengjie Zhou, Yuechan Kong, Tangsheng Chen. CL-TWE Mach–Zehnder electro-optic modulator based on InP-MQW optical waveguides[J]. Chinese Optics Letters, 2019, 17(6): 061301

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Chinese Optics Letters, Vol. 17, Issue 6, 061301 (2019)

CL-TWE Mach–Zehnder electro-optic modulator based on InP-MQW optical waveguides

Guang Qian1,*, Bin Niu1, Wu Zhao2, Qiang Kan2, Xiaowen Gu1, Fengjie Zhou1, Yuechan Kong1, and Tangsheng Chen1

Author Affiliations

  • 1Science and Technology on Monolithic Integrated Circuits and Modules Laboratory, Nanjing Electronic Devices Institute, Nanjing 210016, China
  • 2Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Abstract

In this Letter, we reported the preliminary results of an integrating periodically capacitive-loaded traveling wave electrode (CL-TWE) Mach–Zehnder modulator (MZM) based on InP-based multiple quantum well (MQW) optical waveguides. The device configuration mainly includes an optical Mach–Zehnder interferometer, a direct current electrode, two phase electrodes, and a CL-TWE consisting of a U electrode and an I electrode. The modulator was fabricated on a 3 in. InP epitaxial wafer by standard photolithography, inductively coupled plasma dry etching, wet etching, electroplating, etc. Measurement results show that the MZM exhibits a 3 dB electro-optic bandwidth of about 31 GHz, a Vπ of 3 V, and an extinction ratio of about 20 dB.

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