Main > Chinese Optics Letters >  Volume 17 >  Issue 12 >  Page 121102 > Article
  • Equations
  • Abstract
  • Figures (9)
  • Tables (3)
  • Equations (18)
  • References (23)
  • Cited By (1)
  • Get PDF
  • View Full Text
  • Paper Information
  • Received: Apr. 24, 2019

    Accepted: Aug. 6, 2019

    Posted: Dec. 3, 2019

    Published Online: Dec. 3, 2019

    The Author Email: Yijiang Shen (yjshen@gdut.edu.cn)

    DOI: 10.3788/COL201917.121102

  • Get Citation
  • Copy Citation Text

    Yijiang Shen, Fei Peng, Xiaoyan Huang, Zhenrong Zhang. Adaptive gradient-based source and mask co-optimization with process awareness[J]. Chinese Optics Letters, 2019, 17(12): 121102

    Download Citation

  • !Citations Alert
  • Category
  • Imaging systems
  • Share
Ic=1Jsumαs,βsJ(αs,βs)p=x,y,zHp(αs,βs)B(αs,βs)M2,(1)

View in Article

(J^,M^)=minJRNs×NsminMRN×NS{T(J,M),I0},(2)

View in Article

S=γpeSpe{I0,I}+γepeSepe{I0,I}+γpvSpv{I0,I},(3)

View in Article

Spe(J,M)=0.5×T(J,M)I02.(4)

View in Article

Speω=asinω2Jsumαs,βsJp=x,y,zReal{B*{Hp*[Ep(II0)I(1I)]}},(5)

View in Article

Speθ=sinω2x,y[a·(II0)I(1I)p=x,y,z|Ep|2IcJsum],(6)

View in Article

Dsum(i,j)={k=jLV2j+LV2Spe(i,k)if(i,j)HSk=jLH2j+LH2Spe(k,j)if(i,j)VS,(7)

View in Article

Sepe=(HS,VS)TPEEPEVs.(8)

View in Article

Sepeϕ=(HS,VS)TPE(i,j)HS or VSsige(Dsum(i,j))ϕ,(9)

View in Article

sige(Dsum)ϕ=aesige(Dsum)[1sige(Dsum)]k=jLV2j+LV2Speϕ,(10)

View in Article

Spv=(I1I2INp1INp)\(I1I2INp1INp),(11)

View in Article

Spv=(I1\FPA)(I2\FPA)(INp\FPA).(12)

View in Article

Spv=1Npk=1NpIkI02=1Npk=1NpSpek,(13)

View in Article

Spvϕ=1Npk=1NpSpekϕ.(14)

View in Article

ϕt+1=ϕtηΔϕt=ϕtη·m^t/(v^t+ϵ),(15)

View in Article

|Δϕt|=t=t1t2|β1/(1β1t+1)|·|mt2|t=t1t2|β2/(1β2t+1)|1/2·|vt2|1/2=t=t1t2|vt|·|Δϕt2|,(16)

View in Article

|Δϕt|=|[β1·mt+(1β1)·gt]/(1β1t)|{[β2·vt+(1β2)·gt2]/(1β2t)}1/2+ϵ=|ρmt|·|gt||ρvt·gt2|1/2+ϵ,(17)

View in Article

ϕt+1=ϕtηs·gt,(18)

View in Article

Please Enter Your Email: