Main > Chinese Optics Letters >  Volume 17 >  Issue 12 >  Page 121102 > Article
  • References
  • Abstract
  • Figures (9)
  • Tables (3)
  • Equations (18)
  • References (23)
  • Cited By (1)
  • Get PDF
  • View Full Text
  • Paper Information
  • Received: Apr. 24, 2019

    Accepted: Aug. 6, 2019

    Posted: Dec. 3, 2019

    Published Online: Dec. 3, 2019

    The Author Email: Yijiang Shen (yjshen@gdut.edu.cn)

    DOI: 10.3788/COL201917.121102

  • Get Citation
  • Copy Citation Text

    Yijiang Shen, Fei Peng, Xiaoyan Huang, Zhenrong Zhang. Adaptive gradient-based source and mask co-optimization with process awareness[J]. Chinese Optics Letters, 2019, 17(12): 121102

    Download Citation

  • !Citations Alert
  • Category
  • Imaging systems
  • Share

[1] A. K. Wong. Resolution Enhancement Techniques in Optical Lithography(2001).

[2] L. W. Liebmann, S. M. Mansfield, A. K. Wong, M. A. Lavin, T. G. Dunham. IBM J. Res. Develop., 45, 651(2001).

[3] A. K. Wong. Optical Imaging in Projection Lithography(2005).

[4] L. Pang, Y. Liu, D. Abrams. Proc. SPIE, 6823, 68230X(2006).

[5] A. Poonawala, P. Milanfar. IEEE. Trans. Image Process., 16, 774(2007).

[6] K. Lai, A. E. Rosenbluth, S. Bagheri, J. Hoffnagle, K. Tian, D. Melville, J. Tirapu-Azpiroz, M. Fakhry, Y. Kim, S. Halle, G. McIntyre. Proc. SPIE, 7274, 72740A(2009).

[7] X. Ma, G. R. Arce. Opt. Express, 17, 5783(2009).

[8] T. Muelders, V. Domnenko, B. Küchler. Proc. SPIE, 7823, 78233X(2010).

[9] N. Jia, E. Y. Lam. IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC), 1(2010).

[10] X. Ma, C. Han, Y. Li, L. Dong, G. R. Arce. J. Opt. Soc. Am. A, 30, 112(2013).

[11] J. Li, E. Y. Lam. Opt. Express, 22, 9471(2014).

[12] X. Wu, S. Liu, J. Li, E. Y. Lam. Opt. Express, 22, 3924(2014).

[13] X. Cao, M. Guan, L. Xia, X. Sang, Z. Chen. Chin. Opt. Lett., 15, 120901(2017).

[14] B. Zhuang, C. Xu, Y. Geng, G. Zhao, H. Chen, Z. He, Z. Wu, L. Ren. Chin. Opt. Lett., 16, 041102(2018).

[15] P. Zhang, D. Liu, A. Yang, J. Zhu. Chin. Opt. Lett., 17, 070901(2019).

[16] Z. Song, X. Ma, J. Gao, J. Wang, Y. Li, G. R. Arce. Opt. Express, 22, 14180(2014).

[17] X. Ma, Z. Wang, Y. Li, G. R. Arce, L. Dong, J. Garcia-Frias. Opt. Express, 26, 14479(2018).

[18] J. C. Yu, P. Yu. Proc. SPIE, 7873, 23067(2011).

[19] Y. Shen, N. Jia, N. Wong. Opt. Express, 19, 5511(2011).

[20] Y. Shen. Opt. Express, 25, 21775(2017).

[21] Y. Shen. Opt. Express, 26, 10065(2018).

[22] N. Jia, E. Y. Lam. Opt. Express, 19, 19384(2011).

[23] J. R. Gao, X. Xu, B. Yu, D. Z. Pan. IEEE Design Automation Conference, 1(2014).

Please Enter Your Email: