Photonics Research, Vol. 8, Issue 5, 05000677 (2020)
Laser trimming of the operating wavelength of silicon nitride racetrack resonators
Greta De Paoli1,2,*, Senta L. Jantzen2, Thalia Dominguez Bucio2, Ilias Skandalos2, Christopher Holmes2, Peter G. R. Smith2, Milan M. Milosevic2, and Frederic Y. Gardes2
- 1Department of Information Engineering, Università degli Studi di Padova, Via Giovanni Gradenigo 6, 35131 Padova, Italy
- 2Optoelectronics Research Centre, University of Southampton, Southampton SO17 1BJ, UK
We demonstrate the possibility of post-fabrication trimming of the response of nitrogen-rich silicon nitride racetrack resonators by using an ultraviolet laser. The results revealed the possibility to efficiently tune the operating wavelength of fabricated racetrack resonators to any point within the full free spectral range. This process is much faster than similar, previously presented methods (in the order of seconds, compared to hours). This technique can also be applied to accurately trim the optical performance of any other silicon photonic device based on nitrogen-rich silicon nitride.
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