Main > Chinese Journal of Lasers >  Volume 47 >  Issue 12 >  Page 1202007 > Article
  • Figures
  • Abstract
  • View Summary
  • Figures (11)
  • Tables (5)
  • Equations (0)
  • References (18)
  • Get PDF(in Chinese)
  • Paper Information
  • Received: Jun. 11, 2020

    Accepted: --

    Posted: Dec. 1, 2020

    Published Online: Nov. 17, 2020

    The Author Email: Ning He (drnhe@nuaa.edu.cn)

    DOI: 10.3788/CJL202047.1202007

  • Get Citation
  • Copy Citation Text

    Chen Ni, Yan Bo, Li Zhenjun, Li Liang, He Ning. Gaussian Pulsed Laser Etching of CVD Diamonds[J]. Chinese Journal of Lasers, 2020, 47(12): 1202007

    Download Citation

  • Category
  • laser manufacturing
  • Share
Schematic of device for nanosecond laser processing of CVD diamonds

Fig. 1. Schematic of device for nanosecond laser processing of CVD diamonds

Download full size

Simulation temperature cloud after single pulse. (a) Horizontal direction; (b) vertical direction

Fig. 2. Simulation temperature cloud after single pulse. (a) Horizontal direction; (b) vertical direction

Download full size

Effect of laser power on etching surface pit morphology. (a) 3W; (b) 4W; (c) 5W; (d) 7W

Fig. 3. Effect of laser power on etching surface pit morphology. (a) 3W; (b) 4W; (c) 5W; (d) 7W

Download full size

Raman spectra

Fig. 4. Raman spectra

Download full size

Morphology of etching pit. (a) Optical morphology; (b) Gaussian fitting of profile

Fig. 5. Morphology of etching pit. (a) Optical morphology; (b) Gaussian fitting of profile

Download full size

Effect of scanning speed on pulse spot overlapping during laser line etching. (a) Relatively small scanning speed; (b) relatively large scanning speed

Fig. 6. Effect of scanning speed on pulse spot overlapping during laser line etching. (a) Relatively small scanning speed; (b) relatively large scanning speed

Download full size

Laser line etching energy density model

Fig. 7. Laser line etching energy density model

Download full size

Line etching widths and side etching depths under different laser scanning speeds. (a) 50mm·s-1; (b) 20mm·s-1; (c) 0.2mm·s-1

Fig. 8. Line etching widths and side etching depths under different laser scanning speeds. (a) 50mm·s-1; (b) 20mm·s-1; (c) 0.2mm·s-1

Download full size

Effect of laser power on line etching width. (a) 3W; (b) 7W; (c) 15W

Fig. 9. Effect of laser power on line etching width. (a) 3W; (b) 7W; (c) 15W

Download full size

Effect of laser power on side surface line etching depth. (a) 3W; (b) 7W; (c) 15W

Fig. 10. Effect of laser power on side surface line etching depth. (a) 3W; (b) 7W; (c) 15W

Download full size

SEM image of laser etched CVD diamond surface. (a) Surface; (b) side surface

Fig. 11. SEM image of laser etched CVD diamond surface. (a) Surface; (b) side surface

Download full size

Please Enter Your Email: