Journal of Infrared and Millimeter Waves, Vol. 34, Issue 6, 2015 (2015)
Uniqueness test for thin film fitting in spectroscopic ellipsometry
Ziyi Wang1, Rongjun Zhang1,*, Bin Tang2, Yuancheng Sun2, Jiping Xu1, Yuxiang Zheng1, Songyou Wang1, Liangyao Chen1, Hua Fan3, Qingjun Liao3, and Yanfeng Wei3
- 1[in Chinese]
- 2[in Chinese]
- 3[in Chinese]
The thickness and dielectric constants of thin films usually have certain correlation in the fitting procedure of spectroscopic ellipsometry (SE). The choice of different dispersion models may also influence the results and cause errors. As the fitting is influenced by the dispersion models adopted in the analysis, the uniqueness test has been introduced into SE fitting. The results of uniqueness test have been compared with different dispersion models, different film thicknesses, different wavelength ranges and different incident angles using titanium dioxide samples as an example. It is indicated that uniqueness test is efficient in evaluating the fitting for SE measurement. Uniqueness test can also provide quantitative comparison among different dispersion models and contribute to fitting precision.
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