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  • Received: Apr. 24, 2015

    Accepted: Jun. 30, 2015

    Posted: Jan. 23, 2019

    Published Online: Sep. 14, 2018

    The Author Email: Chaoyang Wei (siomwei@siom.ac.cn)

    DOI: 10.3788/COL201513.091404

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    Wenwen Liu, Chaoyang Wei, Kui Yi, Jianda Shao. Multiscale analysis of single- and multiple-pulse laser-induced damages in HfO2/SiO2 multilayer dielectric films at 532 nm[J]. Chinese Optics Letters, 2015, 13(9): 091404

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(a) S-on-1 probability curves of 532 nm HR coatings, (b) and (c) are the evolution of LIDT and 100% damage probability threshold versus shot number.

Fig. 1. (a) S-on-1 probability curves of 532 nm HR coatings, (b) and (c) are the evolution of LIDT and 100% damage probability threshold versus shot number.

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Damage morphologies for (a)–(c) fluence of 19.7 J/cm2 at 532 nm, (d) 86.7 J/cm2 at 1064 nm in one-on-one mode tested by optical microscopy.

Fig. 2. Damage morphologies for (a)–(c) fluence of 19.7J/cm2 at 532 nm, (d) 86.7J/cm2 at 1064 nm in one-on-one mode tested by optical microscopy.

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SEM micrographs of the damage sites shown in Figs. 2(a)–2(c).

Fig. 3. SEM micrographs of the damage sites shown in Figs. 2(a)2(c).

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SEM micrograph of the damage site shown in Fig. 2(a).

Fig. 4. SEM micrograph of the damage site shown in Fig. 2(a).

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Damage morphologies for fluence of (a) 10.5, (b) 12.1 , (c) 19.7 , and (d) 24.9 J/cm2 at shot number N=1.

Fig. 5. Damage morphologies for fluence of (a) 10.5, (b) 12.1, (c) 19.7, and (d) 24.9J/cm2 at shot number N=1.

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Depth information of the plasma scald area for the damage site shown in Fig. 2(a). The probe of the step profiler moves along the white line.

Fig. 6. Depth information of the plasma scald area for the damage site shown in Fig. 2(a). The probe of the step profiler moves along the white line.

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AFM section analysis and SEM micrograph of damage at 10.5 J/cm2 for N=1.

Fig. 7. AFM section analysis and SEM micrograph of damage at 10.5J/cm2 for N=1.

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Surface profiler of the damage sites at fluence 24.9 J/cm2 for shot number N=1.

Fig. 8. Surface profiler of the damage sites at fluence 24.9J/cm2 for shot number N=1.

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The FIB micrograph of the 532 nm HR coatings.

Fig. 9. The FIB micrograph of the 532 nm HR coatings.

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Damage morphologies for (a) 18 J/cm2, N=10 and (b) 14.8 J/cm2, N=30, tested by optical microscopy and SEM.

Fig. 10. Damage morphologies for (a) 18J/cm2, N=10 and (b) 14.8J/cm2, N=30, tested by optical microscopy and SEM.

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The AFM section analysis of the damage site shown in Fig. 10(a).

Fig. 11. The AFM section analysis of the damage site shown in Fig. 10(a).

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