Chinese Journal of Lasers, Vol. 44, Issue 1, 102004 (2017)
Application of Micro-Optical Components Fabricated with Femtosecond Laser
Xiaowen Cao1,*, Lei Zhang1, Yongsen Yu2, and Qidai Chen2
- 1[in Chinese]
- 2[in Chinese]
Fabrication and application of micro-optical components are attracting broad attention in recent years. Micro-optical components have important applications in the fields of optical fiber communication, information, aerospace, biomedicine, laser technology, and optical computing, because they can achieve function that the ordinary optical components are hard to realize for their small size, light weight, low cost and ease to integrate with micro-electromechanical systems. Femtosecond laser can achieve micro/nano fabrication with ultra-high precision due to their ultrashort pulse width and ultrahigh pick power, which breaks the diffraction limit easily. Femtosecond laser can process almost any materials flexibly with arbitrary complex structures, which enriches the fabrication of micro-optical components. Further, the femtosecond laser processing can be carried out on the existing structure or system, which greatly expands the application of micro-optical components. A brief overview of the advantage and common fabrication methods of micro-optical components is given and the femtosecond laser processing technology briefly is summarized. Then, the experimental and applied research of micro-optical components fabricated with femtosecond laser are reviewed. Finally, some prospects and forecasts about the research of micro-optical components are given.
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