Main > Acta Optica Sinica >  Volume 31 >  Issue 7 >  Page 712001 > Article
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  • Received: Nov. 17, 2010

    Accepted: --

    Posted: Jul. 1, 2011

    Published Online: Jun. 18, 2020

    The Author Email: Weiqi Liu (

    DOI: 10.3788/aos201131.0712001

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    Zhang Jian, Liu Weiqi, Wang Rudong, Kang Yusi, Feng Rui, Wei Zhonglun, Liu Hua. Effect of Gravity Deformation on Optical Performance of Super-Accuracy Fizeau Interferometer[J]. Acta Optica Sinica, 2011, 31(7): 712001

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Acta Optica Sinica, Vol. 31, Issue 7, 712001 (2011)

Effect of Gravity Deformation on Optical Performance of Super-Accuracy Fizeau Interferometer

Jian Zhang1,2, Weiqi Liu1,*, Rudong Wang1, Yusi Kang1, Rui Feng1, Zhonglun Wei1, and Hua Liu1

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  • 1[in Chinese]
  • 2[in Chinese]


In order to realize the figure accuracy of λ/100 peak-vally (PV) value for the lithographic projection objective, the effect of gravity deformation on the optical performance of large-aperture Fizeau interferometer with super accuracy has been deeply analyzed. The optical configuration designed with a wavefront aberration of λ/1000(PV) and a numerical aperture(NA) of 0.36 in image space are employed to test the spherical surface with a diameter larger than 300 mm. One element in the configuration is analyzed by the finite element method (FEM) under two supporting types: adhesive support and retainer support. Based on the finite element analysis(FEA) results, surface deformation and body displacement due to gravity are obtained under a certain condition of load. By Zernike polynomials, the surface deformation is fitted, the wavefront error is acquired, the optomechanical conversion is finished, and a proper supporting type is proposed. When this supporting type is applied to the whole configuration, the wavefront aberration of the system achieved is better than λ/100 (PV). The result verifies that super accuracy can be reached. Besides, the data offered here will be useful for a reasonable interferometer design.


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