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  • Received: Apr. 23, 2020

    Accepted: May. 9, 2020

    Posted: Jul. 21, 2020

    Published Online: Jul. 24, 2020

    The Author Email: Tianqing Jia (tqjia@phy.ecnu.edu.cn)

    DOI: 10.3788/COL202018.093201

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    Kaiqiang Cao, Long Chen, Ke Cheng, Zhenrong Sun, Tianqing Jia. Regular uniform large-area subwavelength nanogratings fabricated by the interference of two femtosecond laser beams via cylindrical lens[J]. Chinese Optics Letters, 2020, 18(9): 093201

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Chinese Optics Letters, Vol. 18, Issue 9, 093201 (2020)

Regular uniform large-area subwavelength nanogratings fabricated by the interference of two femtosecond laser beams via cylindrical lens

Kaiqiang Cao1,2, Long Chen1, Ke Cheng1, Zhenrong Sun1, and Tianqing Jia1,2,*

Author Affiliations

  • 1State Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
  • 2Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China

Abstract

Inhomogeneity and low efficiency are two important factors that hinder the wide application of laser-induced periodic surface structures. Two-beam interference is commonly used to fabricate gratings with interference periods. This study reports regular and uniform periodic ripples fabricated efficiently by the interference of two femtosecond laser beams via a cylindrical lens. The interference period is adjusted to be an integer multiple of the wavelength of a surface plasmon polariton. Regular and uniform subwavelength nanogratings (RUSNGs) on a silicon wafer of a diameter of 100 mm are fabricated with a scanning velocity of 6–9 mm/s. Bright and pure colors (including purple, blue, and red) are demonstrated on different patterns covered with RUSNGs.

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