Chinese Optics Letters, Vol. 18, Issue 9, 093201 (2020)
Regular uniform large-area subwavelength nanogratings fabricated by the interference of two femtosecond laser beams via cylindrical lens
Kaiqiang Cao1,2, Long Chen1, Ke Cheng1, Zhenrong Sun1, and Tianqing Jia1,2,*
- 1State Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
- 2Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
Inhomogeneity and low efficiency are two important factors that hinder the wide application of laser-induced periodic surface structures. Two-beam interference is commonly used to fabricate gratings with interference periods. This study reports regular and uniform periodic ripples fabricated efficiently by the interference of two femtosecond laser beams via a cylindrical lens. The interference period is adjusted to be an integer multiple of the wavelength of a surface plasmon polariton. Regular and uniform subwavelength nanogratings (RUSNGs) on a silicon wafer of a diameter of 100 mm are fabricated with a scanning velocity of 6–9 mm/s. Bright and pure colors (including purple, blue, and red) are demonstrated on different patterns covered with RUSNGs.
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