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  • Received: Apr. 18, 2007

    Accepted: --

    Posted: May. 20, 2008

    Published Online: May. 20, 2008

    The Author Email: Zhiyong Luo (luozhy@nim.ac.cn)

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    Zhiyong Luo, Jialin Dai. Study on an improved five-interferogram phase-shifting algorithm[J]. Chinese Optics Letters, 2008, 6(5): 342

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Chinese Optics Letters, Vol. 6, Issue 5, 342 (2008)

Study on an improved five-interferogram phase-shifting algorithm

Zhiyong Luo*, and Jialin Dai

Author Affiliations

  • National Institute of Metrology, Beijing 100013

Abstract

Using traditional five-interferogram algorithm to unwrap phase for length measurement, the phase steps must be equal to \pi/2 exactly, but it is almost impossible to achieve in nanometer positioning technique. Aiming to overcome this defect of traditional five-interferogram algorithm, an improved five-interferogram algorithm is presented. This improved algorithm not only keeps the high accuracy of traditional five-interferogram algorithm, but also does not need absolute equal step to unwrap phase. Instead, this algorithm only needs measuring phase-shifting. With the numerical simulation, the improved five-interferogram algorithm shows high accuracy, high reliability, and feasibility in practice. It is very valuable for accurate length measurement with Fizeau interferometer and Fabry-Perot interferometer.

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