Chinese Optics Letters, Vol. 7, Issue 3, 180 (2009)
Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region
Hui Lin, Lichao Zhang, Chunshui Jin, Hongjun Zhou, and Tonglin Huo
- State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 1000842 State Key Lab of Applied Optics, Changchun Institute of Optics and Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 1300223 National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029
We fabricate and measure a multilayer-coated ion-beam-etched laminar grating for the extreme ultraviolet wavelength region. The fabrication process is carefully controlled so that the grating groove and multilayer-coating parameters well meet the design targets. At an incident angle of 10\degree, the peak diffraction efficiency of the +1st order is 20.6% at 14.56 nm and that of the -1st order is 22.1% at 14.65 nm, both close to the theoretical limits.