Chinese Journal of Lasers, Vol. 47, Issue 9, 0901001 (2020)
Simulation of Discharge Shock Waves in Excimer Laser
Liu Bin1,2,3, Ding Jinbin1,3,**, Zhou Yi1,3, Jiang Rui1,3, and Wang Yu1,2,*
- 1Opto-Electronic Technology Center, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
- 2University of Chinese Academy of Sciences, Beijing 100049, China
- 3Beijing RSLaser Opto-Electronics Technology Co., Ltd, Beijing 100176, China
The calculation method of shock wave energy source in discharge chamber of excimer laser was analyzed. Two-dimensional simulation of the physical process of discharge shock wave was carried out by Fluent software. The evolution process of transverse and longitudinal shock waves in 300 μs was revealed. In this process, the distributions of gas velocity, density, pressure, and temperature are obtained. Based on the analysis of the simulation results, the key points in the design of high repetition rate discharge chamber and the processing methods are given. The reference basis for choosing parameters such as the size and boundary of discharge chamber is put forward.
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