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  • Received: Jul. 30, 2019

    Accepted: Nov. 14, 2019

    Posted: Dec. 24, 2019

    Published Online: Dec. 30, 2019

    The Author Email: Xiaodong Fang (, Xi Wang (

    DOI: 10.3788/COL202018.021403

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    Jingzhen Shao, Xu Liang, Libing You, Ning Pan, Ying Lin, Shimao Wang, Zanhong Deng, Xiaodong Fang, Xi Wang. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser[J]. Chinese Optics Letters, 2020, 18(2): 021403

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Chinese Optics Letters, Vol. 18, Issue 2, 021403 (2020)

Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser

Jingzhen Shao1,2,3, Xu Liang1,2,3, Libing You1,2, Ning Pan1, Ying Lin1, Shimao Wang1,2, Zanhong Deng1, Xiaodong Fang1,2,*, and Xi Wang2,3,**

Author Affiliations

  • 1Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China
  • 2Advanced Laser Technology Laboratory of Anhui Province, Hefei 230037, China
  • 3State Key Laboratory of Pulsed Power Laser Technology, National University of Defense Technology, Hefei 230037, China


The laser-induced damage threshold of a calcium fluoride (CaF2) single crystal was obtained by a 193 nm ArF excimer laser. The damage morphology of the crystal was analyzed. The results showed that the surface of CaF2 single crystal broke along the natural cleavage plane under ArF excimer laser irradiation, some fragments fell off, and Newton’s rings were observed on the curved fragments. Laser-induced periodic stripe structures (LIPSS) appeared on the surface layer beneath the fragments that peeled off. The spacing of LIPSS was measured, and the formation mechanism of LIPSS was analyzed based on the interference model.


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