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  • Received: Feb. 13, 2004

    Accepted: --

    Posted: Jun. 6, 2006

    Published Online: Jun. 6, 2006

    The Author Email: Weining Wang (wwn-phy@mail.cnu.edu.cn)

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    Weining Wang, Jianhai Sun. A modified moire interferometer for three-dimensional displacement measurement[J]. Chinese Optics Letters, 2004, 2(7): 07396

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Chinese Optics Letters, Vol. 2, Issue 7, 07396 (2004)

A modified moire interferometer for three-dimensional displacement measurement

Weining Wang1,* and Jianhai Sun2

Author Affiliations

  • 1Department of Physics, Capital Normal University, Beijing 100037
  • 2Institute of Electronics, Chinese Academy of Sciences, Beijing 100080

Abstract

This paper presents a new optical interferometric system, MMI-T/G, composed of a modified four-beam moire interferometer and a Twyman/Green interferometer. The MMI-T/G system can measure three-dimensional displacement fringe patterns with a single loading on the specimen, and the in-plane and out-of-plane displacement fields can be measured independently and defined clearly. The optical setup has the advantages of structural novelty, flexibility, and high fringe contrast. Moreover, the in-plane displacement sensitivity is twice of that of the normal moire interferometer. The measuring techniques to obtain the fringe patterns and displacement fields using the MMI-T/G system are described. The experimental results of thermal displacement of an electronic device are shown.

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