Chinese Journal of Lasers, Vol. 45, Issue 10, 1001005 (2018)
Femtosecond Laser Dual-Mode Rapid Fabrication Based on Spatial Light Modulator
Wu Peichao1,**, Zhang Chenchu2,*, Yang Liang1, Li Jiawen1, Hu Yanlei1, and Wu Dong1,***
- 1Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China,Hefei, Anhui 230026, China
- 2Institute of Industry & Equipment Technology, Hefei University of Technology, Hefei, Anhui 230009, China;
The femtosecond laser dual-mode two-photon polymerization fabrication method based on a spatial light modulator (SLM) is proposed. The fabrication modes of focus control scanning and patterned exposure are realized by the load of the corresponding holograms on the SLM. These two fabrication modes not only ensure the fabrication quality, but also increase the fabrication efficiency of two-photon polymerization. By these two different modes, the Rio Olympic emblem and patterns with different shapes are fabricated, respectively. The feasibilities of these two fabrication methods in the micro-nano fabrication field are verified.
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