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  • Received: May. 11, 2004

    Accepted: --

    Posted: Jun. 6, 2006

    Published Online: Jun. 6, 2006

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    Aijun Zeng, Xiangzhao Wang, Yang Bu, Dailin Li. Position sensor based on slit imaging[J]. Chinese Optics Letters, 2004, 2(9): 09520

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Chinese Optics Letters, Vol. 2, Issue 9, 09520 (2004)

Position sensor based on slit imaging

Aijun Zeng, Xiangzhao Wang, Yang Bu, and Dailin Li

Author Affiliations

  • Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800


A position sensor based on slit imaging is proposed and its measurement principle is described. An imaging slit is illuminated by a collimated laser beam with square-wave modulation and imaged on a detection double slit through a 4f system. A magnified image of the detection double slit is formed on a bi-cell detector. The position of the imaging slit is obtained by detecting light intensity on two parts of the bi-cell detector. In experiments, the feasibility of the sensor was verified. The repeatability was less than 40 nm.


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