Acta Optica Sinica, Vol. 34, Issue 2, 206003 (2014)
Reliability Study of DFB Laser Fabricated by Nanoimprint Technology
Jianyi Zhao1,*, Xin Chen1, Ning Zhou2, Mingde Cao2, Xiaodong Huang2, and Wen Liu1,3
- 1[in Chinese]
- 2[in Chinese]
- 3[in Chinese]
The influence of nanoimprint technology on the epitaxial materials is analyzed with the use of photoluminescence and X-ray diffraction. 1.55 μm distributed feedback (DFB) laser diodes for optical fiber communication are fabricated using nanoimprint technology, and then accelerating life test is applied to these devices. Results show that soft stamp nanoimprint will not lead to a serious degradation of the epitaxial materials. The lifetimes of the lasers fabricated by nanoimprint and exposure method are on the same order of magnitude, indicating that nanoimprint technology is safe and reliable to the fabrication of lasers.
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