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  • Received: Jun. 7, 2004

    Accepted: --

    Posted: Jun. 6, 2006

    Published Online: Jun. 6, 2006

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    Hongbin Yu, Haiqinq Chen, Jun Li, Chao Wang. An in situ growth method for property control of LPCVD polysilicon film[J]. Chinese Optics Letters, 2004, 2(8): 08489

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[12] M. J. Madou, Fundamentals of Microfabrication: the Science of Miniaturization (2nd edition) (CRC Press, Boca Raton, 2002).

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