• Frontiers of Optoelectronics
  • Vol. 12, Issue 2, 180–189 (2019)
Xiaoli JING1、2, Haobo CHENG1、2、*, and Yongfu WEN1、2
Author Affiliations
  • 1School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
  • 2Shenzhen Research Institute, Beijing Institute of Technology, Shenzhen 518057, China
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    Abstract

    A fast and effective shape reconstruction method of large aspheric specular surfaces with high order terms is proposed in fringe reflection technique, which combines modal estimation with high-order finitedifference algorithm. The iterative equation with highorder truncation errors is derived for calculating the specular surface with large aperture based on high-order finite-difference algorithm. To achieve the wavefront estimation and improve convergence speed, the numerical orthogonal transformation method based on Zernike polynomials is implemented to obtain the initial iteration value. The reconstruction results of simulated surface identified the advantages of the proposed method. Furthermore, a freeform in illuminating system has been used to demonstrate the validity of the improved method in practical measurement. The results show that the proposed method has the advantages of making the reconstruction of different shape apertures accurate and rapid. In general, this method performs well in measuring large complex objects with high frequency information in practical measurement.
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    Xiaoli JING, Haobo CHENG, Yongfu WEN. Shape reconstruction of large optical surface with high-order terms in fringe reflection technique[J]. Frontiers of Optoelectronics, 2019, 12(2): 180
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    Received: Apr. 4, 2018
    Accepted: Jul. 11, 2018
    Posted: Feb. 1, 2019
    Published Online: Nov. 14, 2019
    The Author Email: CHENG Haobo (chenghaobo@tsinghua.org.cn)