1Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900, China
2Key Laboratory of Optoelectronic Technology and System, Chongqing University, Chongqing 400030, China
Laser self-mixing interferometer has the advantages of simple architecture, compact size, naturally self-aligned optical characteristics, and low cost. It is promising to replace conventional interferometers for physical measurements, such as displacement, distance, velocity, vibration, and so on. In this paper, this interferometer was tried to be used for micro-electromechanical system (MEMS) dynamic measurement. Firstly, its measurement principle based on a three-mirror cavity model was presented, and then the laser self-mixing interferometer for MEMS dynamic measurement was designed, experiments were finally performed as target moves with different forms. Experimental results suggest that self-mixing interferometer is available for MEMS dynamic measurement, and may have wider applications in the future.